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how would each of them typically compare with respect to delay, power and energy consumption? (Used in digital circuits)

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Above 180 -> 110 nm (depending upon whose process it is) you caould easily follow the scaling rules and get a rough order of magnitude. However, moving to 65 nm and below, several significant changes take place that don't allow direct scaling based estimation to work. Things like high K gate di-electric, Low K-dielectric in the BEOL (Back End Of Line). You really need to compare data-sheets directly, and these are only available under NDA.

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