Let's pick a node, say 45nm. How many wafer fabs are there worldwide that can produce chips with that resolution? Tens? Hundreds? And does this mean that producing equipment for them is almost a cottage industry with very little in the way of economies of scale?
I think around 10 for process nodes below 130nm would be a correct ballpark assumption. Wikipedia has quite a comprehensive list of semiconductor fabrication plants with some details missing (i.e. process nodes for TSMC fabs are not specified.)
Producing equipment for these fabs, as you have rightly guessed, is not a high volume business. However, it's a specialty business that has a $33B market which is not small at all. The 70% of this market is dominated by 10 companies, as listed in Wikipedia.
I don't think I'd go as far as to say it's a cottage industry.