I am thinking of using the LDC1612 by TI to sense position over a 0 to 10mm range with an accuracy better than 100nm. I have been told this is possible by a TI engineer.
However, my question concerns relative dimensions of coil diameter and target. I am especially concerned with linearity of response, or the ability to linearize it either in circuit or mathematically.
Diameters - Is it best to have a coil>>target?
Does anyone here have any experience with this type of sensing?