I have a masks layout of a Piezoresistive MEMs pressure device that I've designed in LEdit(Tanner Tools Eda). The device consists of 4 piezoresistors bonded onto a thin diaphragm which deforms depending on the pressure acting on it. I have the piezoresistors in a full Wheatstone bridge. I was wondering how to go about simulating the device to test its performance without using COMSOL as it is not available to me. I have Solidworks/MATLAB as well as the Tanner Suite which contains a circuit simulator for the unfamiliar.


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