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I have a MEMS design and I've understood that producing a prototype in a fab will cost around 500K Euro.

I am trying to estimate the cost of making 1 wafer in production but I'm not sure what to look for, as I don't know the costs of the machines and human labor (and other stuff that I don't know that I don't know :). The only variable I calculated is the number of dies I will get per wafer.

Can anyone explain what other variables I should look for and where can I get them from? (i.e, wafer cost, cost of layer 1/2/...n, cost of packaging, etc.), can I even do it by myself or should I ask professional help?

Thanks all and hope you will find it interesting and useful.

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