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For C-V curve below for 3 different materials, (Si, InAs, InSb). What material will be corresponding to curve A/B/C?

My understanding is that C is inversely proportional to the dielectric constant in the inversion region. As a result, Si has the smallest dielectric constant and therefore matches with C. InAs = B InSb = Center image description here

Is my understanding correct? Thank you for your help!

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Yes. You are correct, if they all have the same cros sectional area and same doping concentration in the semiconductor.

For a MOS capacitor, the capacitance value in inversion region is given by the the series combination of insulator capacitance (\$C_{ox}\$) and the semiconductor capacitance in inversion (\$C_{s}\$). Since all the three capacitors have same capacitance in the accumulation region, \$C_{ox}\$ values are same. \$C_s\$ depends on dielectric constant of the semiconductor (\$\epsilon_s\$) and doping in the material. So if the doping is can be assumed to be same, then MOS capacitor with least \$C_s\$ will have lowest capacitance.

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  • \$\begingroup\$ Thank you for your help! I found the equation Cs = (W_d / ϵ ) ^-1, if ϵ decrease then Cs decrease. this matches what you suggested! \$\endgroup\$
    – tinyhulk
    Aug 16, 2019 at 17:30
  • \$\begingroup\$ @tinyhulk note that \$W_d\$ has a \$\sqrt{\epsilon}\$ term inside. \$\endgroup\$
    – nidhin
    Aug 16, 2019 at 18:26

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