I am trying to develop a driver to control a MEMS mirror by Mirrorcle. The specific component is A8L2.2-5000AU-TINY48.4. The data sheet only includes VdifferenceMax and and frequency information, but no where on it can I find the specifications for the required current and voltage needed to operate the device. Would I have to calculate that on my own? I've looked all over the web for this info, but got nothing.
They do give a bias voltage of 90v and the difference voltage implying that the two electrodes in each axis are relative to that bias voltage. So you will need two single-ended drivers per axis.
Assuming that is true your driver will need to provide about 0-180V for each axis.
The current required for electrostatic actuators is essentially zero and they act as a pure capacitive load. I would expect the actuator capacitance to be very low and dominated by the package and connections to the driver.
I designed a system with similar mirrors with >750 in one unit requiring ~3,000 drivers. In that case, the interconnect capacitance was hundreds of picofarads. But I only used 15uA in the output stage of each driver to keep total power consumption low.