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3 votes
2 answers
602 views

Why is CVD not used in the manufacture of NMOS gate oxides?

I know that chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, high-performance solid materials. The process is often used in the manufacture of semiconductors ...
LUFER's user avatar
  • 469
3 votes
0 answers
319 views

What is the shortest possible *channel length* in a currently available commercial CMOS process?

I'm aware that terms like "5 nm", "7 nm" for the latest technology nodes no longer refer to any linear dimension of the transistors, although I have seen some interpretations in ...
Halleff's user avatar
  • 705