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A device which includes a central processing unit (CPU), memory, and (generally) an assortment of I/O peripherals (UART, ADC, DAC, general-purpose I/O, I2C, etc.) in a tightly-coupled standalone package.
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What are the smallest microcontrollers?
You can add to your list the new CY8C4014FNI-421 , with a 16 pin WLCSP at 1.56 x 1.45 x 0.4 mm, only slightly larger than the attiny, and has 12 gpio, 16k flash and 2k sram.